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Roughness study on L/S patterning with chemo

dc.contributor.authorDudash, Viktor
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorLorusso, Gian
dc.contributor.authorHer, YoungJun
dc.contributor.authorLi, Jin
dc.contributor.authorMonreal, Victor
dc.contributor.authorBaskaran, Durairaj
dc.contributor.authorALPERSON, BOAZ
dc.contributor.authorSKJONNEMAND, KARL
dc.contributor.authorMack, Chris
dc.date.accessioned2021-10-27T08:58:47Z
dc.date.available2021-10-27T08:58:47Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32921
dc.sourceIIOimport
dc.titleRoughness study on L/S patterning with chemo
dc.typeProceedings paper
dc.contributor.imecauthorDudash, Viktor
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorHer, YoungJun
dc.source.peerreviewyes
dc.source.conferenceThe 5th DSA symposium
dc.source.conferencedate16/10/2019
dc.source.conferencelocationMilano Italy
dc.identifier.urlhttps://www.dsasymposium.org/index.php/program
imec.availabilityPublished - imec


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