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TEM investigations of gate-all-around nanowire devices

dc.contributor.authorFavia, Paola
dc.contributor.authorRichard, Olivier
dc.contributor.authorEneman, Geert
dc.contributor.authorMertens, Hans
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCapogreco, Elena
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorKundu, Paromita
dc.contributor.authorLoo, Roger
dc.contributor.authorVancoille, Eric
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-27T09:10:21Z
dc.date.available2021-10-27T09:10:21Z
dc.date.issued2019
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32954
dc.sourceIIOimport
dc.titleTEM investigations of gate-all-around nanowire devices
dc.typeJournal article
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage124003
dc.source.journalSemiconductor Science and Technology
dc.source.issue12
dc.source.volume34
dc.identifier.urlhttps://iopscience.iop.org/article/10.1088/1361-6641/ab4b8b
imec.availabilityPublished - imec


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