Publication:

TEM investigations of gate-all-around nanowire devices

Date

2019

Journal article

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Author(s)

;

Richard, Olivier

;

;

;

Arimura, Hiroaki

;

Capogreco, Elena

;

Hikavyy, Andriy

;

Witters, Liesbeth

;

Kundu, Paromita

;

;

Vancoille, Eric

;

Journal

Semiconductor Science and Technology

Statistics

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