Publication:

TEM investigations of gate-all-around nanowire devices

Date

2019
Journal article
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dc.contributor.authorFavia, Paola
dc.contributor.authorRichard, Olivier
dc.contributor.authorEneman, Geert
dc.contributor.authorMertens, Hans
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCapogreco, Elena
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorKundu, Paromita
dc.contributor.authorLoo, Roger
dc.contributor.authorVancoille, Eric
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-27T09:10:21Z
dc.date.available2021-10-27T09:10:21Z
dc.date.issued2019
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32954
dc.identifier.urlhttps://iopscience.iop.org/article/10.1088/1361-6641/ab4b8b
dc.source.beginpage124003
dc.source.issue12
dc.source.journalSemiconductor Science and Technology
dc.source.volume34
dc.title

TEM investigations of gate-all-around nanowire devices

dc.typeJournal article
dspace.entity.typePublication
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