Publication:

TEM investigations of gate-all-around nanowire devices

Date

2019

Journal article

Simple item page Full metadata Statistics

Author(s)

;

Richard, Olivier

;

;

;

Arimura, Hiroaki

;

Capogreco, Elena

;

Hikavyy, Andriy

;

Witters, Liesbeth

;

Kundu, Paromita

;

;

Vancoille, Eric

;

Journal

Semiconductor Science and Technology

Statistics

1874 since deposited on 2021-10-27

Acq. date: 2026-02-24