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Low-frequency Noise and Defects in Copper and Ruthenium Resistors

dc.contributor.authorFleetwood, Dan
dc.contributor.authorBeyne, Sofie
dc.contributor.authorjiang, Rong
dc.contributor.authorZhao, S. E.
dc.contributor.authorWhang, P.
dc.contributor.authorBonaldo, S.
dc.contributor.authorMcCurdy, M. W.
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorCroes, Kristof
dc.contributor.authorZhang, E. X.
dc.contributor.authorAlles, M. S.
dc.contributor.authorSchrimpf, Ronald
dc.contributor.authorReed, Robert
dc.contributor.authorLinten, Dimitri
dc.date.accessioned2021-10-27T09:15:08Z
dc.date.available2021-10-27T09:15:08Z
dc.date.issued2019
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32968
dc.sourceIIOimport
dc.titleLow-frequency Noise and Defects in Copper and Ruthenium Resistors
dc.typeJournal article
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.source.peerreviewyes
dc.source.beginpage203501
dc.source.journalApplied Physics Letters
dc.source.issue20
dc.source.volume114
dc.identifier.urlhttps://doi.org/10.1063/1.5093549
imec.availabilityPublished - imec


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