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On the impact of reduced thermal budget on HfO2 electron trap and SiO2 hole trap defect bands in RMG gate stacks for sequential 3D CMOS integration
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Authors
Franco, Jacopo
;
Wu, Zhicheng
;
Claes, Dieter
;
Vandooren, Anne
;
Horiguchi, Naoto
;
Linten, Dimitri
;
Grasser, Tibor
;
Kaczer, Ben
Conference
IEEE Semiconductor Interface Specialists Conference - SISC
Title
On the impact of reduced thermal budget on HfO2 electron trap and SiO2 hole trap defect bands in RMG gate stacks for sequential 3D CMOS integration
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Meeting abstract
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