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dc.contributor.authorFranquet, Alexis
dc.date.accessioned2021-10-27T09:19:43Z
dc.date.available2021-10-27T09:19:43Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32981
dc.sourceIIOimport
dc.titleAdvanced characterization of nanometer size structures by TOFSIMS
dc.typeOral presentation
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewno
dc.source.conferenceTowards 3D-nanochemical Analysis: Combined TOFSIMS-SFM Infrastructure at the Service of R&D in Flanders
dc.source.conferencedate21/05/2019
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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