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A holistic approach of SIMS analysis for advanced semiconductor structures

dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPirkl, Alexander
dc.contributor.authorKayser, Sven
dc.contributor.authorMoellers, Rudolf
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-27T09:21:25Z
dc.date.available2021-10-27T09:21:25Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32986
dc.sourceIIOimport
dc.titleA holistic approach of SIMS analysis for advanced semiconductor structures
dc.typeProceedings paper
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.conferenceSIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry
dc.source.conferencedate20/10/2019
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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