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Is there a future for cryogenic SOI?

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-06T10:48:12Z
dc.date.available2021-10-06T10:48:12Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3298
dc.sourceIIOimport
dc.titleIs there a future for cryogenic SOI?
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage37
dc.source.endpage50
dc.source.conferenceProceedings of the 9th International Symposium on Silicon-on-Insulator Technology and Devices
dc.source.conferencedate02/05/1999
dc.source.conferencelocationSeattle, WA USA
imec.availabilityPublished - open access


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