Novel volatile film for the protection of organo-silicate glass dielectric materials

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Authors

Fujikawa, Makoto; Yamaguchi, Tatsuya; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru; Kawasaki, H.; Chanson, Romain; de Marneffe, Jean-Francois

ISSN

0894-6507

Issue

4

Journal

IEEE Transactions on Semiconductor Manufacturing

Volume

32

Title

Novel volatile film for the protection of organo-silicate glass dielectric materials

Publication type

Journal article

Embargo date

9999-12-31

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