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Novel volatile film for the protection of organo-silicate glass dielectric materials

dc.contributor.authorFujikawa, Makoto
dc.contributor.authorYamaguchi, Tatsuya
dc.contributor.authorNozawa, S.
dc.contributor.authorKikuchi, Y.
dc.contributor.authorMaekawa, Kaoru
dc.contributor.authorKawasaki, H.
dc.contributor.authorChanson, Romain
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-27T09:24:37Z
dc.date.available2021-10-27T09:24:37Z
dc.date.issued2019
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32995
dc.sourceIIOimport
dc.titleNovel volatile film for the protection of organo-silicate glass dielectric materials
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage438
dc.source.endpage443
dc.source.journalIEEE Transactions on Semiconductor Manufacturing
dc.source.issue4
dc.source.volume32
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8846871
imec.availabilityPublished - open access


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