Electrical characterization of ultra shallow dopant profiles

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Authors
Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murell, A. J.
Conference
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
Title
Electrical characterization of ultra shallow dopant profiles
Publication type
Proceedings paper
Embargo date
9999-12-31
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