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Photonic properties of periodic arrays of nanoscale Si fins

dc.contributor.authorGawlik, Andrzej
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMisiewicz, Jan
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-27T09:33:12Z
dc.date.available2021-10-27T09:33:12Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33018
dc.sourceIIOimport
dc.titlePhotonic properties of periodic arrays of nanoscale Si fins
dc.typeProceedings paper
dc.contributor.imecauthorGawlik, Andrzej
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecGawlik, Andrzej::0000-0002-6540-2735
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1092727
dc.source.conferencePhotonic and Phononic Properties of Engineered Nanostructures IX
dc.source.conferencedate2/02/2018
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2510070
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10927


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