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Ruthenium recess for buried power rail integration

dc.contributor.authorGupta, Anshul
dc.contributor.authorGrzeskowiak, Jodi
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorYu, Kai-Hung
dc.contributor.authorJoy, Nicolas
dc.contributor.authorKundu, Shreya
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHeylen, Nancy
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorSmith, Jeffrey
dc.contributor.authorRaley, Angelique
dc.contributor.authordeVilliers, Anton
dc.contributor.authorBiesemans, Serge
dc.contributor.authorWilson, Chris
dc.contributor.authorLeusink, Gert
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-27T09:52:26Z
dc.date.available2021-10-27T09:52:26Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33068
dc.sourceIIOimport
dc.titleRuthenium recess for buried power rail integration
dc.typeMeeting abstract
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.source.peerreviewno
dc.source.beginpage4.08
dc.source.conferenceIITC-MAM 2019
dc.source.conferencedate3/06/2019
dc.source.conferencelocationnn nn
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


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