Size independent pH sensitivity for ion sensitive FinFETs down to 10 nm width

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Authors

Gupta, Mihir; Santermans, Sybren; Veloso, Anabela; Tao, Zheng; Li, Waikin; Hellings, Geert; Lagae, Liesbet; Van Roy, Wim; Martens, Koen

ISSN

1530-437X

Issue

16

Journal

IEEE Sensors Journal

Volume

19

Title

Size independent pH sensitivity for ion sensitive FinFETs down to 10 nm width

Publication type

Journal article

Embargo date

9999-12-31

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