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Size independent pH sensitivity for ion sensitive FinFETs down to 10 nm width

dc.contributor.authorGupta, Mihir
dc.contributor.authorSantermans, Sybren
dc.contributor.authorVeloso, Anabela
dc.contributor.authorTao, Zheng
dc.contributor.authorLi, Waikin
dc.contributor.authorHellings, Geert
dc.contributor.authorLagae, Liesbet
dc.contributor.authorVan Roy, Wim
dc.contributor.authorMartens, Koen
dc.date.accessioned2021-10-27T09:52:52Z
dc.date.available2021-10-27T09:52:52Z
dc.date.issued2019
dc.identifier.issn1530-437X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33069
dc.sourceIIOimport
dc.titleSize independent pH sensitivity for ion sensitive FinFETs down to 10 nm width
dc.typeJournal article
dc.contributor.imecauthorGupta, Mihir
dc.contributor.imecauthorSantermans, Sybren
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorLi, Waikin
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorVan Roy, Wim
dc.contributor.imecauthorMartens, Koen
dc.contributor.orcidimecGupta, Mihir::0000-0003-0286-7997
dc.contributor.orcidimecSantermans, Sybren::0000-0002-0843-102X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecVan Roy, Wim::0000-0003-3232-1987
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage6578
dc.source.endpage6586
dc.source.journalIEEE Sensors Journal
dc.source.issue16
dc.source.volume19
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8695112
imec.availabilityPublished - open access


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