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CMOS-compatible selective biofunctionalization using a patterned sacrificial layer approach

dc.contributor.authorHa, Seungkyu
dc.contributor.authorVos, Rita
dc.contributor.authorVidal Cabanilles, Maria
dc.contributor.authorMartens, Koen
dc.contributor.authorStakenborg, Tim
dc.contributor.authorVan Dorpe, Pol
dc.contributor.authorJans, Karolien
dc.date.accessioned2021-10-27T09:54:29Z
dc.date.available2021-10-27T09:54:29Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33073
dc.sourceIIOimport
dc.titleCMOS-compatible selective biofunctionalization using a patterned sacrificial layer approach
dc.typeOral presentation
dc.contributor.imecauthorHa, Seungkyu
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVidal Cabanilles, Maria
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.imecauthorJans, Karolien
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceEngineering of Functional Interfaces (EnFI)-2019
dc.source.conferencedate8/07/2019
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttps://indico.fys.kuleuven.be/event/56/contributions/1742/contribution.pdf
imec.availabilityPublished - open access


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