dc.contributor.author | Haider, Ali | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Deng, Shaoren | |
dc.contributor.author | Schapmans, Elie | |
dc.contributor.author | Maes, Jan | |
dc.contributor.author | Girard, Jean-Marc | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.contributor.author | El Hajjam, Gabriel Khalil | |
dc.contributor.author | Goux, Ludovic | |
dc.contributor.author | Delhougne, Romain | |
dc.date.accessioned | 2021-10-27T09:57:34Z | |
dc.date.available | 2021-10-27T09:57:34Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33081 | |
dc.source | IIOimport | |
dc.title | Pulsed CVD/ALD of amorphous GeSe for application as OTS selector | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Haider, Ali | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Deng, Shaoren | |
dc.contributor.imecauthor | Maes, Jan | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.imecauthor | Delhougne, Romain | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.source.peerreview | yes | |
dc.source.conference | EuroCVD 22 - Baltic ALD 16 Conference | |
dc.source.conferencedate | 24/06/2019 | |
dc.source.conferencelocation | Luxembourg Luxembourg | |
dc.identifier.url | https://www.eurocvd-balticald2019.lu/programme/detailed-programme/day-4-june-27-2019/ | |
imec.availability | Published - imec | |