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Modelling of display-compatible piezoelectric micromachined ultrasonic transducers for haptic feedback
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Authors
Halbach, Alexandre
;
Gijsenbergh, Pieter
;
Jeong, Yongbin
;
Billen, Margo
;
Chare, Christopher
;
Gao, Hang
;
Brondani Torri, Guilherme
;
Cheyns, David
;
Rottenberg, Xavier
;
Rochus, Veronique
Conference
20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Title
Modelling of display-compatible piezoelectric micromachined ultrasonic transducers for haptic feedback
Publication type
Proceedings paper
Embargo date
9999-12-31
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