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New access to soft breakdown parameters of low k dielectrics through localization-based analysis

dc.contributor.authorHerfurth, Norbert
dc.contributor.authorSimon-Najasek, M.
dc.contributor.authorHerfurth, R.
dc.contributor.authorHübner, S.
dc.contributor.authorAltmann, Frank
dc.contributor.authorBeyreuther, A.
dc.contributor.authorAmini, E.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorWu, Chen
dc.contributor.authorCroes, Kristof
dc.contributor.authorBoit, Christian
dc.date.accessioned2021-10-27T10:15:48Z
dc.date.available2021-10-27T10:15:48Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33128
dc.sourceIIOimport
dc.titleNew access to soft breakdown parameters of low k dielectrics through localization-based analysis
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.conference2019 IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedate31/03/2019
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8720458
imec.availabilityPublished - imec


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