Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays

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Authors

Hermans, Artur; Van Daele, Michiel; Dendooven, Jolien; Clemmen, Stephane; Detavernier, Christophe; Baets, Roel

ISSN

0146-9592

Issue

5

Journal

Optics Letters

Volume

44

Title

Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays

Publication type

Journal article

Embargo date

9999-12-31

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