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Integrated silicon nitride electro-optic modulators with atomic layer deposited overlays

dc.contributor.authorHermans, Artur
dc.contributor.authorVan Daele, Michiel
dc.contributor.authorDendooven, Jolien
dc.contributor.authorClemmen, Stephane
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-27T10:17:23Z
dc.date.available2021-10-27T10:17:23Z
dc.date.issued2019-03
dc.identifier.issn0146-9592
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33132
dc.sourceIIOimport
dc.titleIntegrated silicon nitride electro-optic modulators with atomic layer deposited overlays
dc.typeJournal article
dc.contributor.imecauthorHermans, Artur
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecHermans, Artur::0000-0003-2911-7125
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1112
dc.source.endpage1115
dc.source.journalOptics Letters
dc.source.issue5
dc.source.volume44
dc.identifier.urlhttps://doi.org/10.1364/OL.44.001112
imec.availabilityPublished - open access


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