dc.contributor.author | Herregods, Sebastiaan | |
dc.contributor.author | Delande, Tinne | |
dc.contributor.author | Pasquali, Mattia | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2021-10-27T10:18:12Z | |
dc.date.available | 2021-10-27T10:18:12Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33134 | |
dc.source | IIOimport | |
dc.title | Vapor phase thiol self-assembled monolayers for DoD ASD | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Herregods, Sebastiaan | |
dc.contributor.imecauthor | Delande, Tinne | |
dc.contributor.imecauthor | Pasquali, Mattia | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.source.peerreview | yes | |
dc.source.conference | ASD19 - 4th Area Selective Deposition (ASD) Workshop | |
dc.source.conferencedate | 4/04/2019 | |
dc.source.conferencelocation | Leuven Belgium | |
imec.availability | Published - imec | |