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X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface

dc.contributor.authorConard, Thierry
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorMaex, Karen
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T10:49:53Z
dc.date.available2021-10-06T10:49:53Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3313
dc.sourceIIOimport
dc.titleX-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage1244
dc.source.endpage1249
dc.source.journalJ. Vacuum Science and Technology A
dc.source.issue4
dc.source.volume17
imec.availabilityPublished - imec


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