X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface

Publication:

1999

Journal article

Author(s)

;

;

;

;

J. Vacuum Science and Technology A

2089 since deposited on 2021-10-06

Acq. date: 2026-02-24