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X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface
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X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Kondoh, Eiichi
;
De Witte, Hilde
;
Maex, Karen
;
Vandervorst, Wilfried
Journal
J. Vacuum Science and Technology A
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2087
since deposited on 2021-10-06
Acq. date: 2025-12-15
Citations
Metrics
Views
2087
since deposited on 2021-10-06
Acq. date: 2025-12-15
Citations