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A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

dc.contributor.authorHeyne, Markus
dc.contributor.authorMarinov, Daniil
dc.contributor.authorBraithwaite, Nicholas
dc.contributor.authorGoodyear, Andy
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorCooke, Mike
dc.contributor.authorRadu, Iuliana
dc.contributor.authorNeyts, Erik C.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-27T10:24:06Z
dc.date.available2021-10-27T10:24:06Z
dc.date.issued2019
dc.identifier.issn2053-1583
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33149
dc.sourceIIOimport
dc.titleA route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion
dc.typeJournal article
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage35030
dc.source.journal2D Materials
dc.source.issue3
dc.source.volume6
dc.identifier.urlhttps://doi.org/10.1088/2053-1583/ab1ba7
imec.availabilityPublished - imec


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