Innovating SRAM design and test program for fast process related defect recognition and failure analysis
dc.contributor.author | Coppens, P. | |
dc.contributor.author | Vanhorebeek, Guido | |
dc.contributor.author | De Backer, E. | |
dc.contributor.author | Yuan, Xiao Jie | |
dc.date.accessioned | 2021-10-06T10:50:09Z | |
dc.date.available | 2021-10-06T10:50:09Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3315 | |
dc.source | IIOimport | |
dc.title | Innovating SRAM design and test program for fast process related defect recognition and failure analysis | |
dc.type | Proceedings paper | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 290 | |
dc.source.endpage | 297 | |
dc.source.conference | In-Line Methods and Monitors for Process and Yield Improvement | |
dc.source.conferencedate | 22/09/1999 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - open access |