Show simple item record

Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments

dc.contributor.authorHuang, Yan-Hua
dc.contributor.authorPorret, Clément
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRengo, Gianluca
dc.contributor.authorPetersen Barbosa Lima, Lucas
dc.contributor.authorKhazaka, Rami
dc.contributor.authorKohen, David
dc.contributor.authorMargetis, Joe
dc.contributor.authorTolle, John
dc.contributor.authorMazzamuto, Fulvio
dc.contributor.authorTabata, Toshiyuki
dc.contributor.authorHeyns, Marc
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-27T10:35:59Z
dc.date.available2021-10-27T10:35:59Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33176
dc.sourceIIOimport
dc.titleImproving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
dc.typeMeeting abstract
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorPetersen Barbosa Lima, Lucas
dc.contributor.imecauthorKhazaka, Rami
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conference2019 E-MRS Fall Meeting
dc.source.conferencedate16/09/2019
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record