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Processing toolkit development for 2D material integration in 300mm silicon production line

dc.contributor.authorHuyghebaert, Cedric
dc.date.accessioned2021-10-27T10:39:55Z
dc.date.available2021-10-27T10:39:55Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33185
dc.sourceIIOimport
dc.titleProcessing toolkit development for 2D material integration in 300mm silicon production line
dc.typeProceedings paper
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conference2019 Graphene and Beyond Workshop and the Graphene Flagship US-EU 2D Workshop
dc.source.conferencedate8/05/2019
dc.source.conferencelocationState College, PA USA
imec.availabilityPublished - imec


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