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Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

dc.contributor.authorIshikawa, Kenji
dc.contributor.authorIshijima, Tatsuo
dc.contributor.authorShirafuji, Tatsuru
dc.contributor.authorArmini, Silvia
dc.contributor.authorDespiau-Pujo, Emilie
dc.contributor.authorGottscho, Richard A
dc.contributor.authorLeusink, Gert
dc.contributor.authorMarchack, Nathan
dc.contributor.authorMurayama, Takahide
dc.contributor.authorOehrlein, Gottlieb S.
dc.contributor.authorPark, Sangwuk
dc.contributor.authorHayashi, Hisataka
dc.contributor.authorKinoshita, Keizo
dc.date.accessioned2021-10-27T10:46:15Z
dc.date.available2021-10-27T10:46:15Z
dc.date.issued2019
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33199
dc.sourceIIOimport
dc.titleRethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageSE0801
dc.source.journalJapanese Journal of Applied Physics
dc.source.issueSE
dc.source.volume58
dc.identifier.urlhttps://doi.org/10.7567/1347-4065/ab163e
imec.availabilityPublished - open access


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