Authors

Ishikawa, Kenji; Ishijima, Tatsuo; Shirafuji, Tatsuru; Armini, Silvia; Despiau-Pujo, Emilie; Gottscho, Richard A; Leusink, Gert; Marchack, Nathan; Murayama, Takahide; Oehrlein, Gottlieb S.; Park, Sangwuk; Hayashi, Hisataka; Kinoshita, Keizo

ISSN

0021-4922

Issue

SE

Journal

Japanese Journal of Applied Physics

Volume

58

Title

Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

Publication type

Journal article

Embargo date

9999-12-31