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Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
Publication:
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective
Date
2019
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ishikawa, Kenji
;
Ishijima, Tatsuo
;
Shirafuji, Tatsuru
;
Armini, Silvia
;
Despiau-Pujo, Emilie
;
Gottscho, Richard A
;
Leusink, Gert
;
Marchack, Nathan
;
Murayama, Takahide
;
Oehrlein, Gottlieb S.
;
Park, Sangwuk
;
Hayashi, Hisataka
;
Kinoshita, Keizo
Journal
Japanese Journal of Applied Physics
Abstract
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1908
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Acq. date: 2025-10-25
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Metrics
Views
1908
since deposited on 2021-10-27
443
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations