Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

Ishikawa, Kenji; Ishijima, Tatsuo; Shirafuji, Tatsuru; Armini, Silvia; Despiau-Pujo, Emilie; Gottscho, Richard A; Leusink, Gert; Marchack, Nathan; Murayama, Takahide; Oehrlein, Gottlieb S.; Park, Sangwuk; Hayashi, Hisataka; Kinoshita, Keizo

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Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

Date

2019

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Oehrlein, Gottlieb S.

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Park, Sangwuk

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Hayashi, Hisataka

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Kinoshita, Keizo

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Japanese Journal of Applied Physics

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1918 since deposited on 2021-10-27

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Acq. date: 2026-02-24

Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

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