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Marangoni drying: a new concept for drying silicon wafers

dc.contributor.authorSchild, R.
dc.contributor.authorLocke, Klaus
dc.contributor.authorKozak, M.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:46:47Z
dc.date.available2021-09-29T12:46:47Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/331
dc.sourceIIOimport
dc.titleMarangoni drying: a new concept for drying silicon wafers
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage31
dc.source.endpage34
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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