Authors

Schmidt, Harald; Meuris, Marc; Mertens, Paul; Rotondaro, Antonio; Heyns, Marc; Hurd, Trace; Hatcher, Z.

Conference

Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM

Title

The importance of H2O2 decomposition in silicon surface cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31