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The importance of H2O2 decomposition in silicon surface cleaning
Publication:
The importance of H2O2 decomposition in silicon surface cleaning
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Date
1994
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Meuris, Marc
;
Mertens, Paul
;
Rotondaro, Antonio
;
Heyns, Marc
;
Hurd, Trace
;
Hatcher, Z.
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2018
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
2018
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations