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Copper-ruthenium system study for advanced hybrid BEOL -interconnects applications

dc.contributor.authorJourdan, Nicolas
dc.contributor.authorKorytov, Maxim
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-27T11:01:16Z
dc.date.available2021-10-27T11:01:16Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33234
dc.sourceIIOimport
dc.titleCopper-ruthenium system study for advanced hybrid BEOL -interconnects applications
dc.typeProceedings paper
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage415
dc.source.endpage416
dc.source.conferenceExtended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate2/09/2019
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - open access


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