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Si trim applications: benefits and challenges

dc.contributor.authorKal, Subhadeep
dc.contributor.authorOniki, Yusuke
dc.contributor.authorPereira, Cheryl
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorChanemougame, Daniel
dc.contributor.authorMosden, Aelan
dc.contributor.authorKumar, Kaushik
dc.contributor.authorBiolsi, Peter
dc.contributor.authorHurd, Trace Q.
dc.date.accessioned2021-10-27T11:02:35Z
dc.date.available2021-10-27T11:02:35Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33237
dc.sourceIIOimport
dc.titleSi trim applications: benefits and challenges
dc.typeMeeting abstract
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorKumar, Kaushik
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.source.peerreviewno
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC)
dc.source.conferencedate2/04/2019
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - imec


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