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Hybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS

dc.contributor.authorKayser, Sven
dc.contributor.authorPirkl, Alexander
dc.contributor.authorZakel, Julia
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.date.accessioned2021-10-27T11:13:01Z
dc.date.available2021-10-27T11:13:01Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33260
dc.sourceIIOimport
dc.titleHybrid SIMS: New possibilities for advanced semiconductor structure analysis with Self-Focusing SIMS
dc.typeProceedings paper
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.source.peerreviewno
dc.source.conferenceECASIA (European Conference on Applications for Surface and Interface Analysis)
dc.source.conferencedate15/09/2019
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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