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Cobalt pre-metallization clean and functional water rinse in BEOL interconnect

dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorAkanishi, Yuya
dc.contributor.authorHideaki, Iino
dc.contributor.authorMizutani, Atsushi
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-27T11:16:31Z
dc.date.available2021-10-27T11:16:31Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33268
dc.sourceIIOimport
dc.titleCobalt pre-metallization clean and functional water rinse in BEOL interconnect
dc.typeMeeting abstract
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorAkanishi, Yuya
dc.contributor.imecauthorHideaki, Iino
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC 2019)
dc.source.conferencedate2/04/2019
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - imec


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