Junction technology challenges and solutions for 3D device architecture

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Authors
Kikuchi, Yoshiaki; Mertens, Hans; Ritzenthaler, Romain; Chiarella, Thomas; Peter, Antony; Horiguchi, Naoto
Conference
19th International Workshop on Junction Technology - IWJT
Title
Junction technology challenges and solutions for 3D device architecture
Publication type
Proceedings paper
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