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Conference contributions
Physico chemical aspects of hydrogen peroxide based silicon wafer cleaning solutions
Publication:
Physico chemical aspects of hydrogen peroxide based silicon wafer cleaning solutions
Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Meuris, Marc
;
Mertens, Paul
;
Rotondaro, Antonio
;
Heyns, Marc
;
Hurd, Trace
;
Hatcher, Z.
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2087
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-08
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Metrics
Views
2087
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-08
Citations