Rutherford backscattering spectrometry analysis of InGaAs nanostructures

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Authors

Laricchiuta, Grazia; Vandervorst, Wilfried; Vickridge, Ian; Mayer, Matej; Meersschaut, Johan

ISSN

0734-2101

Issue

2

Journal

Journal of Vacuum Science and Technology A

Volume

37

Title

Rutherford backscattering spectrometry analysis of InGaAs nanostructures

Publication type

Journal article

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