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Rutherford backscattering spectrometry analysis of InGaAs nanostructures

dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVickridge, Ian
dc.contributor.authorMayer, Matej
dc.contributor.authorMeersschaut, Johan
dc.date.accessioned2021-10-27T12:06:51Z
dc.date.available2021-10-27T12:06:51Z
dc.date.issued2019
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33374
dc.sourceIIOimport
dc.titleRutherford backscattering spectrometry analysis of InGaAs nanostructures
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.beginpage020601-1
dc.source.endpage020601-5
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.issue2
dc.source.volume37
dc.identifier.urlhttps://doi.org/10.1116/1.5079520
imec.availabilityPublished - imec


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