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Wet etching of Ruthenium: effect of thermal annealing

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-27T12:12:30Z
dc.date.available2021-10-27T12:12:30Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33386
dc.sourceIIOimport
dc.titleWet etching of Ruthenium: effect of thermal annealing
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC 2019)
dc.source.conferencedate1/04/2019
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - imec


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