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Kinetics of defect annihilation in chemo-epitaxy directed self-assembly

dc.contributor.authorLi, Jiajing
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorMannaert, Geert
dc.contributor.authorNealey, Paul F.
dc.date.accessioned2021-10-27T12:31:18Z
dc.date.available2021-10-27T12:31:18Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33424
dc.sourceIIOimport
dc.titleKinetics of defect annihilation in chemo-epitaxy directed self-assembly
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorMannaert, Geert
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage109600V
dc.source.conferenceAdvances in Patterning Materials and Processes XXXVI
dc.source.conferencedate24/02/2019
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2514731
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol.10960


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