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Large-area compatible fabrication and optimization of micropump aided by vorticity-based algorithm

dc.contributor.authorLiang, Boshen
dc.contributor.authorHeremans, Paul
dc.contributor.authorCheyns, David
dc.date.accessioned2021-10-27T12:40:15Z
dc.date.available2021-10-27T12:40:15Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33441
dc.sourceIIOimport
dc.titleLarge-area compatible fabrication and optimization of micropump aided by vorticity-based algorithm
dc.typeProceedings paper
dc.contributor.imecauthorLiang, Boshen
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorCheyns, David
dc.contributor.orcidimecLiang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.source.peerreviewyes
dc.source.conferenceInternational MicroNanoConference (iMNC2019)
dc.source.conferencedate10/12/2019
dc.source.conferencelocationUtrecht Netherlands
imec.availabilityPublished - imec


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