Design of slot waveguide for ultra-violet light based on atomic layer deposition

Thumbnail
View/open
Metadata
Show full item record
Authors
Lin, Chupao; Baets, Roel; Roelkens, Gunther; Le Thomas, Nicolas
Conference
21st European Conference on Integratred Optics (ECIO 2019)
Title
Design of slot waveguide for ultra-violet light based on atomic layer deposition
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections