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Joule heating study in scaled Cu, Co and Ru interconnects

dc.contributor.authorLofrano, Melina
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCroes, Kristof
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-27T12:53:54Z
dc.date.available2021-10-27T12:53:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33468
dc.sourceIIOimport
dc.titleJoule heating study in scaled Cu, Co and Ru interconnects
dc.typeProceedings paper
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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