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The refined EUVL mask model
Publication:
The refined EUVL mask model
Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Makhotkin, Igor
;
Wu, Meiyi
;
Philipsen, Vicky
;
Soltwisch, Victor
;
Scholze, Frank
Journal
Abstract
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1928
since deposited on 2021-10-27
432
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Acq. date: 2025-10-24
Citations
Metrics
Views
1928
since deposited on 2021-10-27
432
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations